1 results
An Analytical Model for Intrinsic Residual Stress Effect on Out-of-Plane Deflection in Chemical-Vapor-Deposited Free-Standing Thick Film
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 695 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, L6.20.1
- Print publication:
- 2001
-
- Article
- Export citation