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The effects of capping barrier layers on the compositional and structural variations of integrated Pb(Zr, Ti)O3 ferroelectric capacitor having the dimension 3 × 3 μm2
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- Journal:
- Journal of Materials Research / Volume 14 / Issue 5 / May 1999
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2053-2060
- Print publication:
- May 1999
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- Article
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