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Low Energy Implantation and Transient Enhanced Diffusion: Physical Mechanisms and Technology Implications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 469 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 265
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- 1997
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Can carbon-implanted silicon be applied as wide-bandgap emitter?
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- Journal:
- Journal of Materials Research / Volume 11 / Issue 7 / July 1996
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1653-1658
- Print publication:
- July 1996
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High-Quality SOI by Oxygen Implantation into Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 93 / 1987
- Published online by Cambridge University Press:
- 25 February 2011, 119
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- 1987
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