We have investigated nano-structured multiphase coatings consisting of mixed carbide components. Two ternary carbide systems, Ti-Mo-C and Ti-Si-C, were examined. Coatings were fabricated by co-sputtering from carbide targets, thereby allowing a complete range of film compositions to be obtained in each system. Films were deposited on Si and sapphire substrates at temperatures ranging from room temperature to 650°C. Film compositions were determined using XPS, and x-ray diffraction and TEM analysis were used to examine the films for texture, grain size, phase stability and the potential for creating nano-structured multiphase films. Mo was found to be soluble in TiC up to about 80% Mo, and between 85–95% Mo a multiphase structure was obtained. The hardness of these films generally did not improve due to the Mo additions. For the Ti-Si-C films, X-ray diffraction results were consistent with the formation of cubic SiC and TiC phases. In these films, the hardness was found to improve with SiC additions optimally giving hardness values of about twice that of TiC alone.