2 results
Ultra-Low energy Ion Implantation of Si into HfO2-based layers for Non Volatile Memory Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1160 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1160-H01-03
- Print publication:
- 2009
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- Article
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Oxide-nitride-oxide Dielectric Stacks with Embedded Si-nanoparticles Fabricated by Low-energy Ion-beam-synthesis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 997 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0997-I03-10
- Print publication:
- 2007
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- Article
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