5 results
Angle Resolved XPS Analysis of Surface Region Defects in Rapid Thermal Annealed Antimony Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 163 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 927
- Print publication:
- 1989
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Spectroscopic Investigation of Arsenic-Induced Surface Defects in High-Dose As+ Implanted Rapid Thermal Annealed Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 138 / 1988
- Published online by Cambridge University Press:
- 28 February 2011, 215
- Print publication:
- 1988
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On the Origin of the New Electron Traps Induced By Rapid Thermal Annealing in GaAs Using Capping Proximity Technique.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 144 / 1988
- Published online by Cambridge University Press:
- 26 February 2011, 27
- Print publication:
- 1988
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Arsenic Redistribution and Outdiffusion in Implanted Czochralski-Grown P-Type Silicon During Rapid Thermal Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 100 / 1988
- Published online by Cambridge University Press:
- 26 February 2011, 695
- Print publication:
- 1988
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Implanted Impurity Incorporation and Segregation Phenomena Induced by PEBA in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 35 / 1984
- Published online by Cambridge University Press:
- 25 February 2011, 257
- Print publication:
- 1984
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