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1 results

Influence of Oxygen Annealing on Electrical Properties of ZnO:Cl Thin Films
Tamar Tchelidze, Ekaterine Chikoidze, Francois Jomard, Ouri Gorochov, Pierre Galtier
Journal: MRS Online Proceedings Library Archive / Volume 994 / 2007
Published online by Cambridge University Press: 01 February 2011, 0994-F01-07
Print publication: 2007
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The influence of oxygen treatment on carrier transport properties of pure ZnO and ZnO:Cl thin films grown by MOCVD were studied. The experimentally obtained values of carrier concentrations after oxyden treatment at different temperatures, were compared with the the results obtained from thermodynemical analysis of the system: ZnO:Cl-Oxyen vapour pressure, using method of quasi-chemical reactions (QCR).