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Improvement of Minority Carrier Lifetime in Thick 4H-SiC Epi-layers by Multiple Thermal Oxidations and Anneals
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1538 / 2013
- Published online by Cambridge University Press:
- 02 May 2013, pp. 329-333
- Print publication:
- 2013
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- Article
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