3 results
Performance Characteristics of 65nm PFETs Using Molecular Implant Species for Source and Drain Extensions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E03-02
- Print publication:
- 2008
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- Article
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Edge Effects of Nitride Film Patterning on Dislocation Generation in Local Oxidation of Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 510 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 269
- Print publication:
- January 1998
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- Article
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Impact of Silicon Wafer Material on Dislocation Generation in Local Oxidation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 532 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 125
- Print publication:
- 1998
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- Article
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