2 results
Contact resistivity of Al/Ti ohmic contacts on p-type ion implanted 4H- and 6H-SiC.
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 742 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, K6.2
- Print publication:
- 2002
-
- Article
- Export citation
A New Process for the Fabrication of SiC Power Devices and Systems on SiCOI (Silicon Carbide On Insulator) Substrates
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 742 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, K7.9
- Print publication:
- 2002
-
- Article
- Export citation