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47 results

Page 1 of 3

  • Approaches for Promoting Accurate Atom Probe Reconstruction
  • T.J. Prosa, B.P. Geiser, D. Reinhard, Y. Chen, D.J. Larson
  • Journal: Microscopy and Microanalysis / Volume 22 / Issue S3 / July 2016
  • Published online by Cambridge University Press: 25 July 2016, pp. 664-665
  • Print publication: July 2016
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  • Atom probe tomography of nanoscale electronic materials
  • D.J. Larson, T.J. Prosa, D.E. Perea, K. Inoue, D. Mangelinck
  • Journal: MRS Bulletin / Volume 41 / Issue 1 / January 2016
  • Published online by Cambridge University Press: 08 January 2016, pp. 30-34
  • Print publication: January 2016
  • View abstract

    As the characteristic length scale of electronic devices shrinks, so does the required scale for measurement techniques to provide useful feedback during development and fabrication. The current capabilities of atom probe tomography (APT), such as detecting a low number of dopant atoms in nanoscale devices or studying diffusion effects in a nanowire (NW), make this technique important for metrology on the nanoscale. Here we review recent APT investigations applied to transistors (including regions such as gate oxide, channel, source, drain, contacts, etc.), heterogeneous dopant incorporation in NWs, and Pt-based nanoparticles.

  • Performance Advances in LEAP systems
  • R.M. Ulfig, D.J. Larson, T.F. Kelly, P.H. Clifton, T.J. Prosa, D.R Lenz, E.X. Oltman
  • Journal: Microscopy and Microanalysis / Volume 20 / Issue S3 / August 2014
  • Published online by Cambridge University Press: 27 August 2014, pp. 1120-1121
  • Print publication: August 2014
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  • Measurement of Detection Efficiency in Atom Probe Tomography
  • T.J. Prosa, B.P. Geiser, R.M. Ulfig, T.F. Kelly, D.J. Larson
  • Journal: Microscopy and Microanalysis / Volume 20 / Issue S3 / August 2014
  • Published online by Cambridge University Press: 27 August 2014, pp. 1160-1161
  • Print publication: August 2014
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  • Progress in Planar Feature Spatial Reconstruction for Atom Probe Tomography
  • B.P. Geiser, D.J. Larson, T.J. Prosa, T.F. Kelly
  • Journal: Microscopy and Microanalysis / Volume 19 / Issue S2 / August 2013
  • Published online by Cambridge University Press: 09 October 2013, pp. 936-937
  • Print publication: August 2013
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    Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

  • Application of Atom Probe Tomography to Atomic Layer Deposited Thin Films
  • A.D. Giddings, T.J. Prosa, T.F. Kelly, D.J. Larson
  • Journal: Microscopy and Microanalysis / Volume 19 / Issue S2 / August 2013
  • Published online by Cambridge University Press: 09 October 2013, pp. 1028-1029
  • Print publication: August 2013
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  • View abstract

    Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Page 1 of 3