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Ion Irradiation Induced Crosslinking Effects on Mechanical Properties of Photoresist Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 585 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 289
- Print publication:
- 1999
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- Article
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Improving the Thermal Stability of Photoresist Films by Ion Beam Irradiation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 504 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 443
- Print publication:
- 1997
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- Article
- Export citation