5 results
Modeling and Experiments of Dopant Diffusion and Defects for Laser annealed Junctions and advanced USJ
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E01-03
- Print publication:
- 2008
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Modeling and Experiments of Boron Diffusion During Sub-Millisecond Non-Melt Laser Annealing in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 912 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0912-C05-06
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- 2006
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Ni Silicide Morphology On Small Features
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C4.4
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- 2004
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Linewidth Dependence of the Reverse Bias Junction Leakage for Co-Silicided Source/Drain Junctions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B1.6
- Print publication:
- 2002
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Electrical Performance and Scalability of Ni-monosilicide towards sub 0.13 μm Technologies
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- Journal:
- MRS Online Proceedings Library Archive / Volume 670 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, K7.1
- Print publication:
- 2001
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