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A Model of the Gas-Phase Chemistry of Boron Nitride CVD From BCl3 and NH 3*
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- Journal:
- MRS Online Proceedings Library Archive / Volume 410 / 1995
- Published online by Cambridge University Press:
- 10 February 2011, 459
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- 1995
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The Decomposition of Methyltrichlorosilane: Studies in A High-Temperature Flow Reactor
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- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 105
- Print publication:
- 1993
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Thermochemical Data for CVD Modeling from Ab initio Calculations
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- Journal:
- MRS Online Proceedings Library Archive / Volume 335 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 131
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- 1993
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Theoretical Study of Gas-Phase Thermodynamics Relevant to Silicon Carbide Chemical Vapor Deiposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 250 / 1991
- Published online by Cambridge University Press:
- 15 February 2011, 29
- Print publication:
- 1991
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