4 results
Enhancement of Boron Activation in Shallow Junctions by Hydrogen
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C7.6
- Print publication:
- 2004
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Effect of Modified Metal/Passivation Interfaces on Stress Voiding in Interconnects+
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- Journal:
- MRS Online Proceedings Library Archive / Volume 563 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 219
- Print publication:
- 1999
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Mechanical Properties and Residual Stresses in Oxide/Metal Multilayer Films Synthesized by Ion Beam Assisted Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 308 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 695
- Print publication:
- 1993
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Synthesis of Al and Al2O3 Coatings by Ion Beam Assisted Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 268 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 203
- Print publication:
- 1992
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