4 results
Doping of Sub-50nm SOI Layers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E04-06
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- 2008
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Ion implantation for low-resistive source/drain contacts in FinFET devices
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E02-01
- Print publication:
- 2008
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Channel engineering and junction overlap issues for ultra-shallow junctions formed by SPER in the 45 nm CMOS technology node
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C10.5
- Print publication:
- 2004
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Ni-Silicided Deep Source/Drain Junctions Formed by Solid Phase Epitaxial Regrowth
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C2.2
- Print publication:
- 2004
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