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The Properties of a-SiC:H and a-SiGe:H Films Deposited by 55 kHz PECVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 557 / 1999
- Published online by Cambridge University Press:
- 15 February 2011, 43
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- 1999
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Stability Improvement of a-Si:H Films Deposited in Sqwm-55 kHz Glow Discharge Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 507 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 493
- Print publication:
- 1998
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The Influence of a-Si:H/Substrate Interface on Electronic Properties Of Me-a-Si:H - Substrate Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 382 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 483
- Print publication:
- 1995
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