Diamond is known as the material that has excellent mechanical, electrical and chemical properties. Diamond is also an ideal interface that is compatible with microelectronics process and biological environments to work as a biosensor platform with excellent selectivity and stability. In our study, nanocrystalline diamond (NCD) films were grown on Si substrates by the microwave plasma enhanced chemical vapor deposition (MPECVD) method. Parameters such as gas composition, temperature and pressure are investigated to get the best film quality. Scanning electron microscopy (SEM) and Raman spectroscopy were used to characterize the NCD films. Then the NCD films were treated by hydrogen plasma in the CVD chamber to obtain the hydrogen terminated surface. This hydrogenated NCD film is ready for bio-modification and can work as the platform of the biosensors. Fourier Transform Infrared Spectroscopy (FTIR) and X-ray Photoelectron Spectroscopy (XPS) were employed to confirm the surface hydrogenation.