2 results
Enhanced Activation of Standard and Cocktail Spike Annealed Junctions with Additional Sub-melt Laser Anneal
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- Journal:
- MRS Online Proceedings Library Archive / Volume 912 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0912-C01-07
- Print publication:
- 2006
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- Article
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The Carbon Co-implant with Spike RTA Solution for Boron Extension
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- Journal:
- MRS Online Proceedings Library Archive / Volume 912 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0912-C01-03
- Print publication:
- 2006
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- Article
- Export citation