4 results
High Integrity SiO2/Al2O3 Gate Stack for Normally-off GaN MOSFET
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1561 / 2013
- Published online by Cambridge University Press:
- 27 June 2013, mrss13-1561-cc02-08
- Print publication:
- 2013
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Novel End-point Detection Method by Monitoring Shear Force Oscillation Frequency for Barrier Metal Polishing in Advanced LSI
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1157 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1157-E13-03
- Print publication:
- 2009
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- Article
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Optimizing Pad Groove Design and Polishing Kinematics for Reduced Shear Force, Low Force Fluctuation and Optimum Removal Rate Attributes of Copper CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1157 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1157-E01-01
- Print publication:
- 2009
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- Article
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High Performance Bottom Gate μc-Si TFT Fabricated by Microwave Plasma CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1066 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1066-A13-04
- Print publication:
- 2008
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