Density multiplication of patterned templates by directed self-assembly (DSA) of block copolymers (BCP) stands out as a promising alternative to overcome the limitation of conventional lithography. Using the 300mm pilot line available in LETI and Arkema’s materials, the main objective is to integrate DSA directly into the conventional CMOS lithography process in order to achieve high resolution and pattern density multiplication at a low cost. Thus we investigate the potential of DSA to address contact and via level patterning by performing either CD shrink or contact multiplication. Our approach is based on the graphoepitaxy of PS-b-PMMA block copolymers. Lithographic performances of block copolymers are evaluated both for contact shrink and contact doubling. Furthermore, advanced characterization technics are used to monitor in-film self-assembly process. These results show that DSA has a high potential to be integrated directly into the conventional CMOS lithography process in order to achieve high resolution contact holes.

The present work fosters experimental measurements and mathematical modelling techniques to primarily determine the thermal and the relative humidity characteristics in the air-conditioned surgical operating room. The present work also demonstrates the effect of the various designs of surgical operating rooms and operational parameters on the flow pattern and temperatures characteristics. This study is a part of a more comprehensive investigation of the more important factors affecting the air environments in surgical operating room. Measured and predicted temperatures and relative humidity profiles are shown to be in good agreement. The present paper introduces several recommendations regarding the optimum design requirements of operating rooms to provide hygiene and comfort environment. Low humidity affects comfort and health. The present work offers examples of measured relative humidity profiles in an operating room in (New Kasr El-Aini Teaching Hospital – 1200 beds – Cairo University – Egypt). These experimental results were carried out to verify the proposed numerical procedure and particularly in the vicinity of the supply outlets and operating table.