5 results
Detection of Metastabile Defective Regions in Ion-Implanted Silicon by Means of Metal Gettering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 469 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 463
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- 1997
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Helium Induced Cavities in Silicon: Their Formation, Microstructure and Gettering Ability
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- Journal:
- MRS Online Proceedings Library Archive / Volume 469 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 451
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- 1997
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Surface-Oriented Oxygen Mass Transport During Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 378 / 1995
- Published online by Cambridge University Press:
- 26 February 2011, 659
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- 1995
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Observation of Vacancy-Oxygen Complexes in Silicon Implanted with Substoichiometric Doses of Oxygen Ions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 378 / 1995
- Published online by Cambridge University Press:
- 26 February 2011, 665
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- 1995
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The Effect of Photoexcitation on Formation of Radiation Defects in Si
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- Journal:
- MRS Online Proceedings Library Archive / Volume 201 / 1990
- Published online by Cambridge University Press:
- 26 February 2011, 477
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- 1990
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