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Formation of Silicon Nanocrystallites by Electron Cyclotron Resonance Chemical Vapor Deposition and Ion Beam Assisted Electron Beam Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 486 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 231
- Print publication:
- 1997
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- Article
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