2 results
7 - Stress and thermal characterisation
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- Book:
- Advanced RF MEMS
- Published online:
- 05 February 2014
- Print publication:
- 19 August 2010, pp 188-204
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Direct Local Strain Measurement In Damascene Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B07-06
- Print publication:
- 2007
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- Article
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