3 results
Conformal MOCVD Deposition of GeSbTe in High Aspect Ratio Via Structure for Phase Change Memory Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1160 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1160-H14-11
- Print publication:
- 2009
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- Article
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CVD of Amorphous GeTe Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1071 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1071-F09-10
- Print publication:
- 2008
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- Article
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Germanium ALD/CVD Precursors for Deposition of Ge/GeTe Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1071 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1071-F09-11
- Print publication:
- 2008
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- Article
- Export citation