3 results
Formation of Porous Organosilicate Glasses Produced by PECVD and UV Treatment
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B01-04
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- 2007
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Impact of Pore Size and Morphology of Porous Organosilicate Glasses on Integrated Circuit Manufacturing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F01-02
- Print publication:
- 2006
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Plasma Enhanced Chemical Vapor Deposition of Porous Organosilicate Glass ILD Films With k ≤ 2.4.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E7.4
- Print publication:
- 2003
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