3 results
Diffusion Barriers For Fluorinated Low-k Dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 197
- Print publication:
- 1999
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- Article
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Diffusion Barriers for Fluorinated Low-k Dielectrics
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 564 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 559
- Print publication:
- 1999
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- Article
- Export citation
Ion Beam Techniques for Low K Materials Characterization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 125
- Print publication:
- 1998
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