3 results
Silicon Oxynitride Membrane for Chemical Sensor Application
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- Journal:
- MRS Online Proceedings Library Archive / Volume 518 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 99
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- 1998
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Atomic Structure of the Interfaces Between Silicon Directly Bonded Wafers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 378 / 1995
- Published online by Cambridge University Press:
- 26 February 2011, 863
- Print publication:
- 1995
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- Article
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Direct Wafer Bonding of Preamorphized Silicon Wafers.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 378 / 1995
- Published online by Cambridge University Press:
- 26 February 2011, 869
- Print publication:
- 1995
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