3 results
Rutherford Backscattering Spectrometry Analysis of Growth Rate and Activation Energy for Self-formed Ti-rich Interface Layers in Cu(Ti)/Low-k Samples
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1156 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1156-D04-09
- Print publication:
- 2009
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- Article
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Deep Levels in Multilayer Structures of Si/Si0.8Ge0.2 Grown by Low-Pressure Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 799 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, Z.34
- Print publication:
- 2003
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- Article
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High Quality Optical Film Formation with O2 Cluster Ion Assisted Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 697 / January 2001
- Published online by Cambridge University Press:
- 17 March 2011, P5.20
- Print publication:
- January 2001
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- Article
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