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Mechanical Characterization of High Aspect Ratio Silicon Nanolines
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1086 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1086-U05-07
- Print publication:
- 2008
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Sequential Process Modeling for Determining Process-Induced Thermal Stress in Advanced Cu/Low-k Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E6.2
- Print publication:
- 2003
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- Article
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