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Atom Probe Tomography Characterization of Dopant Distributions in Si FinFET: Challenges and Solutions
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- Journal:
- Microscopy and Microanalysis / Volume 26 / Issue 1 / February 2020
- Published online by Cambridge University Press:
- 22 November 2019, pp. 36-45
- Print publication:
- February 2020
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A Quasi-2d Model for Reverse Short Channel Effect
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- Journal:
- MRS Online Proceedings Library Archive / Volume 532 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 141
- Print publication:
- 1998
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Surface Damage During Kev Ion Irradiation: Results of Computer Simulations
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- Journal:
- MRS Online Proceedings Library Archive / Volume 388 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 337
- Print publication:
- 1995
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Defect Production Mechanisms During keV Ion Irradiation: Results of Computer Simulations
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- Journal:
- MRS Online Proceedings Library Archive / Volume 373 / 1994
- Published online by Cambridge University Press:
- 16 February 2011, 3
- Print publication:
- 1994
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