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Diamond-Like Carbon Thin Films with Extremely High Compressive Stress (>8~12GPa) for Advanced CMOS Strain Engineering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1427 / 2012
- Published online by Cambridge University Press:
- 09 August 2012, mrss12-1427-b07-16
- Print publication:
- 2012
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- Article
- Export citation