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TEM Study of Oxygen Precipitation in Si Wafers with Backside Layers
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- Journal:
- Microscopy and Microanalysis / Volume 11 / Issue S02 / August 2005
- Published online by Cambridge University Press:
- 01 August 2005, pp. 2070-2071
- Print publication:
- August 2005
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- Article
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Detecting Impurities in the Ultra Thin Silicon Oxide Layer By Hg-Schottky Capacitance–Voltage (CV) Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 670 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, K7.7
- Print publication:
- 2001
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- Article
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