1 results
Cyclically Varying Hydrogen Dilution for the Growth of Very Thin and Doped Nanocrystalline Silicon Films by Hot-Wire CVD
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1066 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1066-A06-11
- Print publication:
- 2008
-
- Article
- Export citation