Hostname: page-component-8448b6f56d-tj2md Total loading time: 0 Render date: 2024-04-23T15:27:43.967Z Has data issue: false hasContentIssue false
  • English
  • Français

Interfacial Structure and Electrical Properties of Transparent Conducting ZnO Thin Films on Polymer Substrates

Published online by Cambridge University Press:  06 August 2013

Young Soo Lim ,
Dae Wook Kim ,
Jong-Ho Kang ,
Seul Gi Seo ,
Bo Bae Kim ,
Hyoung-Seuk Choi ,
Won-Seon Seo ,
Yong Soo Cho  and
Hyung-Ho Park
Young Soo Lim
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea
Dae Wook Kim
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
Jong-Ho Kang
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
Seul Gi Seo
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
Bo Bae Kim
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
Hyoung-Seuk Choi
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea
Won-Seon Seo*
Affiliation:
Energy and Environmental Division, Korea Institute of Ceramic Engineering and Technology, 233-5 Gasan-dong, Geumcheon-gu, Seoul 153-801, Korea
Yong Soo Cho
Affiliation:
Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
Hyung-Ho Park
Affiliation:
Department of Materials Science and Engineering, Yonsei University, 134 Sinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
*
*Corresponding author. E-mail: wsseo@kicet.re.kr
Get access

Abstract

The effects of polymer substrates on the interfacial structure and the thermal stability of Ga-doped ZnO (GZO) thin films were investigated. The GZO thin films were deposited on polyethylene terephthalate (PET) and polyethylene naphthalate (PEN) substrates by rf-magnetron sputtering at room temperature, and thermal stability tests of the GZO thin films on the polymer substrates were performed at 150°C up to 8 h in air. Electrical and structural characterizations of the GZO thin films on the PET and the PEN substrates were carried out, and the origins of the stable interfacial structure and the improved thermal stability of the GZO thin film on the PEN substrate were discussed.

Keywords

zinc oxidetransparent conducting oxidesputteringthermal stabilityoligomer
Type
Research Article
Information
Microscopy and Microanalysis , Volume 19 , Supplement S5: IUMAS , August 2013 , pp. 131 - 135
Copyright
Copyright © Microscopy Society of America 2013 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Bayraktaroglu, B., Leedy, K. & Bedford, R. (2008). High temperature stability of postgrowth annealed transparent and conductive ZnO:Al films. Appl Phys Lett 93, 022104.10.1063/1.2959071Google Scholar
Bishop, C.A. (2010). Roll-to-Roll Vacuum Deposition of Barrier Coatings. Leicestershire, UK: Wiley.10.1002/9780470876510Google Scholar
Cheng, C. & Wagner, S. (2009). Overview of flexible electronics technology. In Flexible Electronics: Materials and Applications, Wong, W.S. & Salleo, A. (Eds.), pp. 1–28. New York: Springer.Google Scholar
Ellmer, K. & Mientus, R. (2008). Carrier transport in polycrystalline transparent conductive oxides: A comparative study of zinc oxide and indium oxide. Thin Solid Films 516, 4620–4627.10.1016/j.tsf.2007.05.084Google Scholar
Fortunato, E., Nunes, P., Marques, A., Costa, D., Águas, H., Ferreira, I., Costa, M.E.V., Godinho, M.H., Almeida, P.L., Borges, J.P. & Martins, R. (2002). Transparent, conductive ZnO:Al thin film deposited on polymer substrates by RF magnetron sputtering. Surf Coat Tech 151/152, 247–251.10.1016/S0257-8972(01)01660-7Google Scholar
Kim, D.W., Kang, J.-H., Lim, Y.S., Lee, M.-H., Seo, W.-S., Park, H.-H., Seo, K.H. & Park, M.G. (2010). Effect of a hard coating layer on the damp heat stability of Ga-doped ZnO thin films on polyethylene terephthalate substrates. J Kor Phys Soc 57, 1045–1048.Google Scholar
Kim, D.W., Kang, J.-H., Lim, Y.S., Lee, M.-H., Seo, W.-S., Park, H.-H., Seo, K.H. & Park, M.G. (2011). Pretreatment of polyethylene terephthalate substrate for the growth of Ga-doped ZnO thin film. J Nanosci Nanotech 11, 1617–1620.10.1166/jnn.2011.3355Google Scholar
Koidis, C., Logothetidis, S., Laskarakis, A., Tsiaoussis, I. & Frangis, N. (2009). Thin film and interface properties during ZnO deposition onto high-barrier hybrid/PET flexible substrates. Micron 40, 130–134.10.1016/j.micron.2008.02.005Google Scholar
MacDonald, B.A., Rollins, K., MacKerron, D., Rakos, K., Eveson, R., Hashimoto, K. & Rustin, B. (2005). Engineered films for display technologies. In Flexible Flat Panel Displays, MacDonald, B.A. (Ed.), pp. 11–33. Chichester, UK: Wiley.10.1002/0470870508.ch2Google Scholar
Minami, T. (2000). New n-type transparent conducting oxides. Mater Res Soc Bull 25, 38–44.10.1557/mrs2000.149Google Scholar
Miyata, T., Ohtani, Y., Kuboi, T. & Minami, T. (2008). Stability of nano-thick transparent conducting oxide films for use in a moist environment. Thin Solid Films 516, 1354–1358.10.1016/j.tsf.2007.03.084Google Scholar
Morkoç, H. & Özgür, Ü. (2009). Zinc Oxide: Fundamentals, Materials and Device Technology. Weinheim, Germany: Wiley-VCH.10.1002/9783527623945Google Scholar
Reichlmaier, S., Bryan, S.R. & Briggs, D. (1995). Surface trimer crystallization on poly (ethylene terephthalate) studied by time-of-flight secondary ion mass spectrometry. J Vac Sci Technol A 13, 1217–1223.10.1116/1.579864Google Scholar
Sans, A., Martinez-Criado, G., Pellicer-Porres, J., Sanchez-Royo, J.F. & Segura, A. (2007). Thermal instability of electrically active centers in heavily Ga-doped ZnO thin films: X-ray absorption study of the Ga-site configuration. Appl Phys Lett 91, 221904.10.1063/1.2802554Google Scholar
Yasuda, H. (1978). Glow discharge polymerization. In Thin Film Processes, Vossen, J.L. & Kern, W. (Eds.), pp. 361–398. New York: Academic Press.10.1016/B978-0-12-728250-3.50014-3Google Scholar
Zhang, D.H. & Brodie, D.E. (1994). Effects of annealing ZnO films prepared by ion-beam-assisted reactive deposition. Thin Solid Films 238, 95–100.10.1016/0040-6090(94)90655-6Google Scholar