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PwrSoC (integration of micro-magnetic inductors/transformers with active semiconductors) for more than Moore technologies*

Published online by Cambridge University Press:  05 July 2013

Cian Ó Mathuna ,
Ningning Wang ,
Santosh Kulkarni  and
Saibal Roy
Cian Ó Mathuna*
Affiliation:
Microsystems Center, Tyndall National Institute, University College Cork, Dyke Parade, Cork, Ireland
Ningning Wang
Affiliation:
Microsystems Center, Tyndall National Institute, University College Cork, Dyke Parade, Cork, Ireland
Santosh Kulkarni
Affiliation:
Microsystems Center, Tyndall National Institute, University College Cork, Dyke Parade, Cork, Ireland
Saibal Roy
Affiliation:
Microsystems Center, Tyndall National Institute, University College Cork, Dyke Parade, Cork, Ireland
*
a e-mail: cian.omathuna@tyndall.ie
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Abstract

This paper introduces the concept of power supply on chip (PwrSoC) which will enable the development of next-generation, functionally integrated, power management platforms with applications in dc-dc conversion, gate drives, isolated power transmission and ultimately, high granularity, on-chip, power management for mixed-signal, SOC chips. PwrSoC will integrate power passives with the power management IC, in a 3D stacked or monolithic form factor, thereby delivering the performance of a highefficiency dc-dc converter within the footprint of a low-efficiency linear regulator. A central element of the PwrSoC concept is the fabrication of power micro-magnetics on silicon to deliver micro-inductors and micro-transformers. The paper details the magnetics on silicon process which combines thin film magnetic core technology with electroplated copper conductors. Measured data for micro-inductors show inductance operation up to 20 MHz, footprints down to 0.5 mm2, efficiencies up to 93% and dc current carrying capability up to 600 mA. Measurements on micro-transformers show voltage gain of approximately – 1 dB at between 10 MHz and 30 MHz.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 63 , Issue 1: International Semiconductor Conference Dresden-Grenoble – ISCDG 2012 , July 2013 , 14408
Copyright
© EDP Sciences, 2013

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Footnotes

*

Contribution to the Topical Issue “International Semiconductor Conference Dresden-Grenoble – ISCDG 2012”, Edited by Gérard Ghibaudo, Francis Balestra and Simon Deleonibus.

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