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Formations of negative ions in Sf6/N2 mixtures and their transport at atmospheric pressure *

Published online by Cambridge University Press:  15 February 2013

Yui Okuyama
Affiliation:
Department of Experimental Physics, Comenius University, Mlynska dolina F2, 84248 Bratislava, Slovakia Graduate School, Chiba Institute of Technology, Tsudanuma, Narashino, Chiba 275-0016, Japan
Martin Sabo
Affiliation:
Department of Experimental Physics, Comenius University, Mlynska dolina F2, 84248 Bratislava, Slovakia
Haruo Itoh
Affiliation:
Graduate School, Chiba Institute of Technology, Tsudanuma, Narashino, Chiba 275-0016, Japan
Štefan Matejčík*
Affiliation:
Department of Experimental Physics, Comenius University, Mlynska dolina F2, 84248 Bratislava, Slovakia
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Abstract

Formation of negative ions initiated by interaction of thermal electrons and in the corona discharge (CD) in N2 with small admixture of SF6; was studied using the ion mobility spectrometry- orthogonal acceleration time-of-flight mass spectrometry (IMS-oaTOF) at atmospheric pressure. The negative ions have been analyzed by the ion mobility spectrometry and mass spectrometry (IMS-MS) and two-dimensional spectra (2D IMS-MS) have been recorded. We discuss the mechanisms of the negative ion formation in the N2/SF6 mixtures (0.003-0.018%) as well as the transport parameters of the ions in these mixtures. The values of the reduced ion mobilities of negative ions formed in these mixtures were determined (2.43 cm2/V s for HF2 (HF)n, 2.32 cm2/V s for NO3 (HF)n, 2.08 cm2/V s for SF5, 2.01 cm2/V s for SOF5, 2.00 for SOF4 1.99 cm2/V s for SF6, 1.83 cm2/V s for SOF5(H2O)n and 1.73 for SOF5(H2O)n(HF)m). The assignment of the ion mobility peaks was performed on the basis of the 2D IMS-MS spectra.

Type
Research Article
Copyright
© EDP Sciences, 2013

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Footnotes

*

Contribution to the Topical Issue “13th International Symposium on High Pressure Low Temperature Plasma Chemistry (Hakone XIII)”, Edited by Nicolas Gherardi, Henryca Danuta Stryczewska and Yvan Ségui.

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