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Real-time high-resolution topographic imagery using interference microscopy

Published online by Cambridge University Press:  15 November 2002

A. Dubois*
Affiliation:
Laboratoire d'Optique Physique, École Supérieure de Physique et Chimie Industrielles, CNRS, UPR A0005, 10 rue Vauquelin, 75231 Paris Cedex 5, France
L. Vabre
Affiliation:
Laboratoire d'Optique Physique, École Supérieure de Physique et Chimie Industrielles, CNRS, UPR A0005, 10 rue Vauquelin, 75231 Paris Cedex 5, France
A.-C. Boccara
Affiliation:
Laboratoire d'Optique Physique, École Supérieure de Physique et Chimie Industrielles, CNRS, UPR A0005, 10 rue Vauquelin, 75231 Paris Cedex 5, France
P. C. Montgomery
Affiliation:
Laboratoire de Physique et Application des Semiconducteurs (PHASE), CNRS, UPR 292, 23 rue du Loess, 67037 Strasbourg, France
B. Cunin
Affiliation:
Laboratoire de Physique et Application des Semiconducteurs (PHASE), CNRS, UPR 292, 23 rue du Loess, 67037 Strasbourg, France
Y. Reibel
Affiliation:
Laboratoire de Physique et Application des Semiconducteurs (PHASE), CNRS, UPR 292, 23 rue du Loess, 67037 Strasbourg, France
C. Draman
Affiliation:
Laboratoire des Sciences de l'Image, de l'Informatique et de la Télédétection (LSIIT), CNRS, UPRES-A 7005/ULP, École Nationale Supérieure de Physique de Strasbourg, boulevard Sébastien Brant, 67400 Illkirch, France
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Abstract

New instrumentation has been developed that is dedicated to the measurement of surface morphology with high resolutions and short acquisition times. Sinusoidal phase-shifting interferometry is demonstrated to provide within an acquisition time of only a few milliseconds topographic images with ~1 nm height precision, ~1 μm lateral resolution, and a few tens of pm sensitivity. A white-light scanning microscope is also under development, using an in-house developed high speed, intelligent CCD camera, the first tests of which demonstrate the feasibility of providing topographic images of deep surface relief (several microns to several tens of microns) within less than 0.3 s. The useful lateral field of view can be extended by employing image “stitching” while maintaining a high lateral resolution. 


Keywords

Type
Research Article
Copyright
© EDP Sciences, 2002

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