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Micromagnetic actuators

Published online by Cambridge University Press:  09 March 2009

K.I. Arai  and
T. Honda
K.I. Arai
Affiliation:
Aral Laboratory, Research Institute of Electrical Communication, Tohoku University, 2–1–1 Katahira, Aoba–ku Sendai 980–77 (Japan). Phone: +81 –22 –217–5487. Fax.: +8 –22 –217–5490
T. Honda
Affiliation:
Aral Laboratory, Research Institute of Electrical Communication, Tohoku University, 2–1–1 Katahira, Aoba–ku Sendai 980–77 (Japan). Phone: +81 –22 –217–5487. Fax.: +8 –22 –217–5490
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Summary

Recent topics in the development of micromagneticactuators in Japan are reviewed. Electromagneticmicroactuators less than 1 mm in diameter, e.g.micromotor, and microvalves have been fabricated andtheir high performance has been demonstrated. A newtype microactuator based upon magnetostriction has alsobeen developed and has shown a large cantileverdeflection. In addition, some models of the microrobotsusing micromagnetic actuators were able to move using awireless remote power supply.

Keywords

Micromagnetic actuatorsMagnetic torqueMagnetostrictionMicrorobots
Type
Article
Information
Robotica , Volume 14 , Issue 5 , September 1996 , pp. 477 - 481
Copyright
Copyright © Cambridge University Press 1996

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References

1. Ahn, C.H., Kim, Y.J. and Allen, M.G., “A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils” Proc. IEEE MEMS'93 Workshop (1993) p. 1 et seq.Google Scholar
2. H., Guckel, Christensen, T.R., Skrobis, K.J., Jung, T.S., Klein, J., Hartojo, K.V. and Widjaja, I., “A first functional current excited planar rotational magnetic micromotor” Proc. IEEE MEMS'93 Workshop (1993) p. 7 et seq.Google Scholar
3. Itoh, T., “Ultra-small electromagnetic motors and micro-generators, and their application to micromachines” J. Magn. Soc. of Japan, 18, 922 (1994) (in Japanese).Google Scholar
4. Yanagisawa, K., Kuwano, H. and Tago, A., “An electromagnetically driven microvalve”7th Int. Conf. on Solid-State Sensors and Actuators, Transducers '93 (1993) p. 102 et seq.Google Scholar
5. Hosaka, H., Kuwano, H. and Yanagisawa, K., “Electromagnetic microrelays: concepts and fundamental characteristics” Proc. IEEE MEMS'93 (1993) p. 12 et seq.Google Scholar
6. A. E., Clark, Ferromagnetic Materials, Vol. 1, (ed. by Wohlfarth, E.P.), (North-Holland, Amsterdam, (1980).Google Scholar
7. Hayashi, Y., Honda, T., Arai, K.I., Ishiyama, K. and Yamaguchi, M., “Dependence of magnetostriction of sputteredTb-Fe Films on preparation conditions” IEEE Trans.Magn. 29, 3129 (1993).CrossRefGoogle Scholar
8. Honda, T., Hayashi, Y., Arai, K.I., Ishiyama, K. and Yamaguchi, M., “Magnetostriction of sputtered Sm-Fe thin films” IEEE Trans. Magn. 29, 3126 (1993).CrossRefGoogle Scholar
9. Honda, T., Arai, K. I. and Yamaguchi, M., “Fabrication of magnetostrictive actuators using rare-earth (Tb, Sm)-Fe thin films” J. Appl. Phys. 76, 6994 (1994).CrossRefGoogle Scholar
10. Akamine, S., Albrecht, T.R., Zdeblick, M.J. and Quate, C.F., “A planar process for microfabrication of a scanning tunneling microscope” Sensors and Actuators A21–A23, 964 (1990).Google Scholar
11. Riethmiüller, and Benecke, W., “Thermally excited silicon microactuators” IEEE Trans. Electron Devices 35, 758 (1988).CrossRefGoogle Scholar
12. Riethmilller, and Uchino, K. “Micro walking machines using piezoelectric actuators” J. Rob. Mech. 1, 124 (1989).Google Scholar
13.Riethmilller, and Yasuda, T., Shimoyama, I. and Miura, H., “Microrobot actuated by a vibration energy field” 7th Int. Conf on Solid-State Sensors and Actuators, Transducers '93 (1993) p. 42 et seq.Google Scholar
14.Riethmilller, and Fukuda, T., Hosokai, H., Ohyama, H., Hashimoto, H. and Arai, F., “Giant magnetostrictive alloy (GMA) applications to micro mobile robot as a micro actuator without power supply cables” Proc. IEEE MEMS'91 Workshop (1991) p. 210 et seq.Google Scholar