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Depth Profiles of Nitrogen and Chlorine in Pure Materials Through AMS of the Neutron Activation Products 14C and 36Cl

Published online by Cambridge University Press:  18 July 2016

David Elmore ,
T Z Hossain ,
H E Gove ,
T K Hemmick ,
P W Kubik ,
S Jiang ,
J P La Vine  and
S T Lee
David Elmore
Affiliation:
Nuclear Structure Research Laboratory, University of Rochester Rochester, New York 14627
T Z Hossain*
Affiliation:
Nuclear Structure Research Laboratory, University of Rochester Rochester, New York 14627
H E Gove
Affiliation:
Nuclear Structure Research Laboratory, University of Rochester Rochester, New York 14627
T K Hemmick
Affiliation:
Nuclear Structure Research Laboratory, University of Rochester Rochester, New York 14627
P W Kubik
Affiliation:
Nuclear Structure Research Laboratory, University of Rochester Rochester, New York 14627
S Jiang
Affiliation:
Nuclear Structure Research Laboratory, University of Rochester Rochester, New York 14627
J P La Vine*
Affiliation:
Nuclear Structure Research Laboratory, University of Rochester Rochester, New York 14627
S T Lee*
Affiliation:
Nuclear Structure Research Laboratory, University of Rochester Rochester, New York 14627
*
**Analytical Technology Division, Research Laboratories, Bldg 82, Eastman Kodak Company, Rochester, New York 14650
**Analytical Technology Division, Research Laboratories, Bldg 82, Eastman Kodak Company, Rochester, New York 14650
**Analytical Technology Division, Research Laboratories, Bldg 82, Eastman Kodak Company, Rochester, New York 14650
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Abstract

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Determination of the more common light elements such as nitrogen and chlorine at trace levels is difficult because of their high abundance on sample surfaces, in materials used to build analysis instruments, and in the residual gas of the instrument vacuum. We present here a new approach to analysis of these elements: accelerator mass spectrometry (AMS) combined with neutron activation. The problem of contamination is overcome by using neutron activation to produce long-lived radioisotopes which generally have low concentrations in the environment. For measurement of 14N and 35Cl, AMS can provide sensitive background-free measurements of their neutron activation products 14C and 36Cl and, in addition, can provide depth profiles. These are the first results of this new method: depth profiles of nitrogen and chlorine implanted in semiconductor grade silicon.

Type
I. Sample Preparation and Measurement Techniques
Information
Radiocarbon , Volume 31 , Issue 3 , 1989 , pp. 292 - 297
Copyright
Copyright © The American Journal of Science 

References

Anthony, J M and Donahue, D J, 1987, Accelerator mass spectrometry solutions to semiconductor problems: Nuclear Instruments & Methods, v B29, p 77–82.CrossRefGoogle Scholar
Anthony, J M and Thomas, J, 1983, Accelerator based mass spectrometry of semiconductor material: Nuclear Instruments & Methods, v 218, p 463.Google Scholar
Bennett, C L, Beukens, R P, Clover, M R, Elmore, D, Gove, H E, Kilius, L, Litherland, A E and Purser, K H, 1978, Radiocarbon dating with electrostatic accelerators: Dating of milligram samples: Science, v 201, p 345–347.CrossRefGoogle Scholar
Casper, L A, 1986, Characterization of materials and processes for semiconductor devices, in Elmore, D, ed, Interagency briefing and workshop to explore needs and opportunities for AMS applications, Proc, Washington, DC, March 28–29, 1985: Univ Rochester, Rochester, New York, p 36–42.Google Scholar
Elmore, D, Fulton, B R, Clover, M R, Marsden, J R, Gove, H E, Naylor, H, Purser, K H, Kilius, L R, Beukens, R P and Litherland, A E, 1979, Analysis of 36Cl in environmental water samples using an electrostatic accelerator: Nature, v 277, p 22–25.Google Scholar
Elmore, D and Phillips, F M, 1987, Accelerator mass spectrometry for measurement of long-lived radioisotopes: Science, v 236, p 543–550.CrossRefGoogle Scholar
Fedoroff, M, Samosyuk, V N, Rouchaud, J C and Loos-Neskovic, C, 1987, Determination of nitrogen in solids by photon and reactor neutron activation: Jour Radioanal Nuclear Chem, v 112, p 319–325.Google Scholar
Hockett, R S, Evans, C A Jr and Chu, P K, 1988, The SIMS measurement of nitrogen in nitrogen-doped CZ-silicon: SIMS VI Conf Proc, Versailles, France.Google Scholar
Kubik, P K, Elmore, D, Hemmick, T K, Gove, H E, Fehn, U, Teng, R T D, Jiang, S and Tullai, S, 1987, Accelerator mass spectrometry at the University of Rochester: Nuclear Instruments & Methods, v B29, p 138–142.CrossRefGoogle Scholar
Purser, K H, Litherland, A E and Rucklidge, J C, 1979, Secondary ion mass spectrometry at close to single-atom concentration using DC accelerators: Surface & Interface Analysis, v 1, p 12.Google Scholar
White, F A and Wood, G M, 1986, Mass spectrometry: Applications in science and engineering: New York, Wiley-Interscience.Google Scholar
Woelfli, W, 1987, Advances in AMS: Nuclear Instruments & Methods, v B29, p 1–13.Google Scholar