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Efficient high-pass filtering with practical, high-yield X-ray transmission mirror optics

Published online by Cambridge University Press:  29 April 2020

David N. Agyeman-Budu*
Cornell High Energy Synchrotron Source, 161 Synchrotron Dr., Ithaca, New York14853, USA
Joel D. Brock
Cornell High Energy Synchrotron Source, 161 Synchrotron Dr., Ithaca, New York14853, USA School of Applied and Engineering Physics, 271 Clark Hall, Ithaca, New York14853, USA
Arthur R. Woll
Cornell High Energy Synchrotron Source, 161 Synchrotron Dr., Ithaca, New York14853, USA
a)Author to whom correspondence should be addressed. Electronic mail:


Although the concept, first demonstration, and potential applications of X-ray transmission mirrors (XTMs) were initially described over 30 years ago, only a few implementations exist in the literature. This is attributed to the unsolved challenge of a thick frame supporting a thin, reflecting membrane which does not itself block the transmitted beam. Here, we introduce a novel approach to solve this problem by employing silicon microfabrication. A robust XTM frame has been fabricated by using a novel two-step etch process, which secures the thin-film membrane without blocking the transmitted beam. Specifically, we have fabricated delicate XTM optics with 90% yield, which consist of 280-nm-thick low-stress silicon nitride membrane windows that are 1.5 mm wide and 125 mm long on silicon substrates. The XTM optics have been demonstrated to be a more efficient high-pass X-ray filter; for example, when configured for 40% transmission of 11.3 keV photons, we measure the reduction of 8.4 keV photons by a factor of 56.

Proceedings Paper
Copyright © 2020 International Centre for Diffraction Data

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