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ZnO-based MESFET Devices

Published online by Cambridge University Press:  31 January 2011

Marius Grundmann ,
Heiko Frenzel ,
Alexander Lajn ,
Holger von Wenckstern ,
Friedrich Schein  and
Michael Lorenz
Marius Grundmann
Affiliation:
grundmann@physik.uni-leipzig.de, Universität Leipzig, Institut für Experimentelle Physik II, Leipzig, Germany
Heiko Frenzel
Affiliation:
grundmann@physik.uni-leipzig.de, Universität Leipzig, Institut für Experimentelle Physik II, Leipzig, Germany
Alexander Lajn
Affiliation:
grundmann@physik.uni-leipzig.de, Universität Leipzig, Institut für Experimentelle Physik II, Leipzig, Germany
Holger von Wenckstern
Affiliation:
grundmann@physik.uni-leipzig.de, Universität Leipzig, Institut für Experimentelle Physik II, Leipzig, Germany
Friedrich Schein
Affiliation:
grundmann@physik.uni-leipzig.de, Universität Leipzig, Institut für Experimentelle Physik II, Leipzig, Germany
Michael Lorenz
Affiliation:
grundmann@physik.uni-leipzig.de, Universität Leipzig, Institut für Experimentelle Physik II, Leipzig, Germany
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Abstract

We present transistors and inverters based on the MESFET principle. The channel consists of thin ZnO:Mg thin films on sapphire, deposited with pulsed laser deposition. The ohmic source and drain contacts are formed with sputtered gold. The Schottky gate electrode is formed by metal oxides providing high barrier height and a reliable contact. The voltage swing of our inverters is superior to any other reported oxide devices. Annealing studies show that our devices withstand temperatures up to 150°C, partly improving during annealing.

Keywords

electronic materialII-VItransparent conductor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1201: Symposium H – Zinc Oxide and Related Materials-2009 , 2009 , 1201-H01-01
Copyright
Copyright © Materials Research Society 2010

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References

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