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X-Ray Diffraction as a Probe for Elastic Strain: Micro- and Nanoscale Investigation of Thin Metal Films

Published online by Cambridge University Press:  01 February 2011

R. Spolenak
R. Spolenak*
Affiliation:
Lab. for Nanometallurgy, Dept. of Materials, ETH Zurich, Switzerland
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Abstract

In the past years the concept of measuring strain by x-rays has changed significantly. The combination of 3rd generation synchrotron sources, advanced focusing techniques and large area detectors has made it possible to probe volumes smaller than a cubic micron. This devolopment has made it possible to probe microstrains directly without having to rely on highly sophisticated models to evaluate peak broadening effects. This paper will provide a review of the state of art of local strain measurements by x-rays, discuss their limitations, provide an outlook of where the field may be going within the next years and address the most important issues to be solved. Examples will be given for the current limits in terms of resolution in time, space, strain and intensity.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 840: Symposium Q – Neutron and X-Ray Scattering as Probes of Multiscale Phenomena , 2004 , Q3.4
Copyright
Copyright © Materials Research Society 2005

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References

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