Hostname: page-component-cd9895bd7-gvvz8 Total loading time: 0 Render date: 2024-12-27T00:18:43.517Z Has data issue: false hasContentIssue false

X-ray characterization of GaN single crystal layers grown by the ammonothermal technique on HVPE GaN seeds and by the sublimation technique on sapphire seeds

Published online by Cambridge University Press:  01 February 2011

Balaji Raghothamachar
Affiliation:
Department of Materials Science & Engineering, SUNY at Stony Brook, Stony Brook, NY 11794–2275, U.S.A.
Michael Dudley
Affiliation:
Department of Materials Science & Engineering, SUNY at Stony Brook, Stony Brook, NY 11794–2275, U.S.A.
Buguo Wang
Affiliation:
Air Force Research Laboratory, Hanscom AFB, MA 01731, U.S.A.
Michael Callahan
Affiliation:
Air Force Research Laboratory, Hanscom AFB, MA 01731, U.S.A.
David Bliss
Affiliation:
Air Force Research Laboratory, Hanscom AFB, MA 01731, U.S.A.
Phanikumar Konkapaka
Affiliation:
Department of Electrical & Computer Engineering, Cornell University, NY 14850, U.S.A.
Huaqiang Wu
Affiliation:
Department of Electrical & Computer Engineering, Cornell University, NY 14850, U.S.A.
Michael Spencer
Affiliation:
Department of Electrical & Computer Engineering, Cornell University, NY 14850, U.S.A.
Get access

Abstract

Single crystal GaN substrates are a more reliable, efficient and low cost alternative to sapphire and SiC substrates that are currently being used for developing nitride based devices such as LEDs, high power FETs and laser diodes. GaN growth by two techniques are investigated here. In ammonothermal growth (analogous to hydrothermal growth which is commonly used for quartz), using potassium and lithium amide as mineralizers and GaN powders and vapor grown polycrystals as nutrients, thick GaN single crystal layers have been grown on both faces of (0001) HVPE GaN seeds in nickel based autoclaves. In GaN sublimation growth, Ga is transported under a temperature gradient in an ammonia atmosphere from a GaN powder source to the sapphire substrate which has a 3–6 micron GaN epilayer deposited on it. Synchrotron white beam x-ray topography (SWBXT) was initially used to image the defect structures in the layers. High resolution x-ray diffraction experiments were also carried out and reciprocal space maps were recorded from the grown GaN layers. Characterization results will be discussed with respect to the growth conditions.

Type
Research Article
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Porowski, S., J. Cryst. Growth, 189/190, 153 (1998).Google Scholar
[2] Leszczynski, M., Grzegory, I., Teisseyre, H., Suski, T., Bockowski, M., Jun, J., Baranowski, J. M., Porowski, S., Domagala, J., J. Cryst. Growth, 169, 235 (1996).Google Scholar
[3] Porowski, S., J. Cryst. Growth, 166, 583 (1996).Google Scholar
[4] Aoki, M., Yamane, H., Shimada, M., Sarayma, S., DiSalvo, F. J., J. Cryst. Growth, 242, 70 (2002).Google Scholar
[5] Yamane, H., Shimada, M., Clarke, S. J., DiSalvo, F. J., Chem. Mater., 9, 413 (1997).Google Scholar
[6] Dwiliński, R., Doradziński, R., Garczyński, J, Sierzputowski, L., Baranowski, J.M., and Kamińska, M., Diamond and Related Materials, 7, 1348 (1998).Google Scholar
[7] Dwilinski, R., Doradzinski, R., Garczynski, J., Sierzputowski, L., Palczewska, M., Wysmolek, Andrzej, Kaminska, M., MRS Internet J. Nitride Semicond. Res., 3, 25 (1998).Google Scholar
[8] Kolis, J. W., Wilcinski, S. W., Laudise, R. A., Mater. Res. Soc. Symp. Proc., 495, 367 (1998).Google Scholar
[9] Raghothamachar, B., Vetter, W. M., Dudley, M., Dalmau, R., Schlesser, R., Sitar, Z., Michaels, E., Kolis, J. W., J. Crystal Growth, 246(3–4), 271280, (2002).Google Scholar
[10] Callahan, M. J., Wang, B., Bouthillette, L. O., Wang, S-Q., Kolis, J. W., Bliss, D. F., Mater. Res. Soc. Symp. Proc. 798, 263 (2004).Google Scholar
[11] Dudley, M., in Encyclopedia of Advanced Materials, 4, Pergamon Press, New York, 1994, p. 2950.Google Scholar
[12] Dudley, M. and Huang, X.R., in Encyclopedia of Materials: Science and Technology, Elsevier Science, New York, 2001.Google Scholar