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Ultraviolet Luminescence Emitted From ZnO Nanostructural Films by KrF Pulsed Laser Deposition

Published online by Cambridge University Press:  01 February 2011

Kenji Ebihara ,
Tamiko Ohshima ,
Tomoaki Ikegami  and
Raj K. Thareja
Kenji Ebihara
Affiliation:
Department of Electrical and Computer Engineering, and Graduate School of Science and Technology, Kumamoto University, Kurokami 2-39-1, Kumamoto 860-8555, Japan
Tamiko Ohshima
Affiliation:
Department of Electrical and Computer Engineering, and Graduate School of Science and Technology, Kumamoto University, Kurokami 2-39-1, Kumamoto 860-8555, Japan
Tomoaki Ikegami
Affiliation:
Department of Electrical and Computer Engineering, and Graduate School of Science and Technology, Kumamoto University, Kurokami 2-39-1, Kumamoto 860-8555, Japan
Raj K. Thareja
Affiliation:
Department of Physics, Indian Institute of Technology Kanpur, Kanpur-208016 (UP), India
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Abstract

Zinc Oxide (ZnO) thin films have been deposited on silicon (100), quartz glass, sapphire (0001), and glass substrates by pulsed laser deposition over a range of process conditions such as versus ambient oxygen gas pressure and substrate temperature. Photoluminescence measurements have been carried out to characterize ZnO thin films for optical device applications. We have also studied the influence of the process conditions on crystal structure and morphology of the grown films. Ultraviolet luminescence near the band gap at 3.25 eV was obtained from the optical pumped grown films. And ZnO thin films deposited on sapphire single crystal substrates exhibited strong stimulated emission around 3.12 eV with increasing pumping energy. ZnO thin films deposited at ambient oxygen gas pressure of 5 mTorr and a substrate temperature of 550 °C were predominantly c-axis oriented regardless of substrate material. The crystallite size of 22.7-49.8 nm was estimated using Scherrer's formula. AFM images of films grown on sapphire substrates display hexagonally shaped grains at various sizes.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 728: Symposium S – Functional Nanostructured Materials through Multiscale Assembly and Novel Patterning Techniques , 2002 , S3.26
Copyright
Copyright © Materials Research Society 2002

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