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Trimethylamine Alane for Low-Pressure Movpe Growth of AlGaAs-Based Materials and Device Structures

Published online by Cambridge University Press:  26 February 2011

R. P. Schneider ,
R. P. Bryan ,
E. D. Jones ,
R. M. Biefeld  and
G. R. Olbright
R. P. Schneider
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185–5800
R. P. Bryan
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185–5800
E. D. Jones
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185–5800
R. M. Biefeld
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185–5800
G. R. Olbright
Affiliation:
Photonics Research Inc., 100 Technology Drive, Broomfield, CO 80021
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Abstract

The use of trimethylamine alane (TMAAl) as an alternative to trimethylaluminum (TMAl) for low-pressure metalorganic vapor-phase epitaxy (MOVPE) of AlGaAs thin films as well as complex optoelectronic device structures has been studied in detail. AlGaAs layers were grown in a horizontal reaction chamber at 20–110 mbar with growth temperatures in the range 650°C≤TG≤750°C. Wafer thickness uniformity is strongly dependent on growth pressure, and is acceptable only for the highest linear flow velocities. The 12K photoluminescence (PL) spectra of AlGaAs layers grown using TMAAl and TEGa exhibit uniformly intense and narrow bound-exciton emission throughout the growth temperature range investigated. To assess the viability of this new source for the low-pressure OMVPE growth of advanced optoelectronic devices, several optically-pumped vertical-cavity surface-emitting laser (VCSEL) structures were grown using TMAAl extensively. Room temperature lasing at 850 nm was reproducibly obtained from the VCSEL structures, with a threshold pumping power comparable to similar structures grown by molecular beam epitaxy in our laboratories.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 240: Symposium E – Advanced III-V Compound Semiconductor Growth, Processing and Devices , 1991 , 69
Copyright
Copyright © Materials Research Society 1992

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References

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