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Three Dimensional Thermal Effects in MEMS Devices

Published online by Cambridge University Press:  15 March 2011

Edward Van Keuren ,
John Currie ,
Matthew Nelson ,
Makarand Paranjape ,
Thomas Schneider ,
Ryan Smith ,
Pat Treado ,
John Ward  and
Robert White
Edward Van Keuren
Affiliation:
Georgetown University, Dept. of Physics, Washington, DC
John Currie
Affiliation:
Georgetown University, Dept. of Physics, Washington, DC
Matthew Nelson
Affiliation:
ChemIcon, Inc., Pittsburgh, PA
Makarand Paranjape
Affiliation:
Georgetown University, Dept. of Physics, Washington, DC
Thomas Schneider
Affiliation:
Georgetown University, Dept. of Physics, Washington, DC Science Applications International Corporation, McLean, VA.
Ryan Smith
Affiliation:
ChemIcon, Inc., Pittsburgh, PA
Pat Treado
Affiliation:
ChemIcon, Inc., Pittsburgh, PA
John Ward
Affiliation:
Science Applications International Corporation, McLean, VA.
Robert White
Affiliation:
Georgetown University, Dept. of Physics, Washington, DC Science Applications International Corporation, McLean, VA.
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Abstract

A three dimensional thermal imaging system is being developed for measuring temperature profiles in MEMS-biomedical devices. These devices rely on a thermal microablation of the dead-skin layer in order to sample transdermal fluids. This is accomplished using microheaters embedded into a PDMS microchannel device. In order to determine the proper functioning as well as long-term safety of the devices, a temperature profile of the device and the skin in contact with the heaters is needed. The results of simple analytical models are used to optimize a proto- type device. Using a three-dimensional chemical imaging microscope and temperature-depend- ent fluorophores, the temperature profile in a sample can be determined quantitatively as well. We demonstrate the technique on a model sample, and discuss extension to other applications such as thermal imaging in biological systems.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 687: Symposium B – Materials Science of Microelectromechanical Systems (MEMS) Devices IV , 2001 , B1.3
Copyright
Copyright © Materials Research Society 2002

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