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Thermodynamic Modeling of Island Size Distributions for InGaAs/GaAs Self Assembled Quantum Dots: A Quantitative Effort to Understand Ensemble Size Nonuniformity

Published online by Cambridge University Press:  01 February 2011

Jeff Cederberg ,
Alexana Roshko ,
Brit Hyland  and
Michael Coltrin
Jeff Cederberg
Affiliation:
jgceder@sandia.gov, Sandia National Laboratories, Sandia National Laboratories, 1515 Eubank Blvd SE, MS 1086, Albuquerque, NM, 87123, United States, (505) 284-5456, (505) 284-5456
Alexana Roshko
Affiliation:
roshko@boulder.nist.gov, NIST, Optoelectronics Divison, 326 Broadway, Boulder, CO, 80305, United States
Brit Hyland
Affiliation:
bhyland@boulder.nist.gov, NIST, Optoelectronics Divison, 326 Broadway, Boulder, CO, 80305, United States
Michael Coltrin
Affiliation:
mecoltri@sandia.gov, Sandia National Laboratory, 1515 Eubank Blvd SE, Albuquerque, NM, 87123, United States
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Abstract

Experimental island count histograms as a function of SAQD volume have been evaluated using an established model. The experimental data was obtained for 51 mm wafers grown by MOCVD and analyzed over the center 26 × 26 mm square of the wafer with AFM. More than one distribution is required for all conditions investigated to obtain adequate representations of the experimental data. Consistent parameters are obtained for samples grown with a variable InAs thickness. Higher growth temperatures results in material being converted into relaxed islands. Extended annealing without AsH3 eliminates small islands, suggesting that they are not a stable distribution.

Keywords

self-assemblyscanning probe microscopy (SPM)III-V
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 959: Symposium M – Quantum Dots—Growth, Behavior and Applications , 2006 , 0959-M14-04
Copyright
Copyright © Materials Research Society 2007

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References

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