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Test Methods for Characterizing Piezoelectric Thin Films

Published online by Cambridge University Press:  10 February 2011

F. J. von Preissig ,
H. Zeng  and
E. S. Kim
F. J. von Preissig
Affiliation:
Department of Electrical Engineering, University of Hawaii at Manoa, Honolulu, HI 96822
H. Zeng
Affiliation:
Department of Electrical Engineering, University of Hawaii at Manoa, Honolulu, HI 96822
E. S. Kim
Affiliation:
Department of Electrical Engineering, University of Hawaii at Manoa, Honolulu, HI 96822
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Abstract

Two experimental techniques for quantifying MEMS-relevant material constants of piezoelectric thin films are presented. The first is an improved version of our recently developed ‘plank method.’ This technique is used to determine the product of the biaxial elastic modulus and the piezoelectric constant d31. The updated method is easier and more precise, and it utilizes the results of dynamic as well as improved static finite-element analyses. The second method is the bulge test, here emphasizing the special requirements of piezoelectric and fragile films. Results from both techniques applied to zinc oxide are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 518: Symposium N – Microelectromechanical Structures for Materials Research , 1998 , 117
Copyright
Copyright © Materials Research Society 1998

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References

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