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Ten Analyses Of Sol-Gel Derived And Sputtered PZT Thin Films

Published online by Cambridge University Press:  16 February 2011

Cheng-Chen Hsueh  and
Martha L. MeCartney
Cheng-Chen Hsueh
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455
Martha L. MeCartney
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, MN 55455
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Abstract

Ferroelectric PZT thin films were prepared by sol-gel methods and RF magnetron sputtering. Sputtered PZT fast fired at 650° for 30 minutes showed microporosity. For the sol-gel route, solution precursors had a significant effect on the microstructure of the crystalline PZT films. PZT thin films derived from metal-organic precursors dissolved in n-propanol were observed to have large and microporous spherulitic grains on the order of 2 μm and phase separation in acetic acid-catalyzed films. In contrast, PZT precursors originated from alcohol exchanges with 2-methoxyethanols resulted in dense films with fine grains of ∼0.2 μm and clear evidence of ferroelectric domains. The dense sol-gel films possessed superior dielectric and ferroelectric properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 200: Symposium Y – Ferroelectric Thin Films I , 1990 , 219
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

1. Gnadinger, F. P. and Bondurant, D. W., IEEE Spectrum 26 (7), 30 (1989).Google Scholar
2. Schmidt, H., J. Non. Cryst. Solids 100, 51 (1988).Google Scholar
3. Zelinski, B. J. J. and Uhlmann, D. R., J. Phys. Chem. Solids 45(10), 1069 (1984).Google Scholar
4. Chen, K. C., Janah, A., and Mackenzie, J. D. in Better Ceramics Through Chemistry II, edited by Brinker, C. J., Clark, D. E., and Ulrich, D. R. (Mater. Res. Soc. Proc. 73, Pittsburgh, PA 1986) pp. 731–736.Google Scholar
5. Lipeles, R. A., Coleman, D. J., and Leung, M. S. in Better Ceramics Through Chemistry II, edited by Brinker, C. J., Clark, D. E., and Ulrich, D. R. (Mater. Res. Soc. Proc. 73, Pittsburgh, PA 1986) pp. 665–670.Google Scholar
6. Budd, K. D., Dey, S. K., and Payne, D. A., Proc. Br. Ceram. Soc.36, 107 (1985).Google Scholar
7. Gurkovich, S. R. and Blum, J. B., in Ultrastructure Processing of Ceramics. Glasses. and Composites, edited by Hench, L. L. and Ulrich, D. R. (John Wiley & Sons, New York, 1984) pp. 152–160.Google Scholar
8. Tsui, Y. T., Hinderaker, P. D., and McFadden, F. J., Rev. Sci. Instr. 39 (10), 1423 (1968).Google Scholar
9. Sanchez, C., Livage, J., Henry, M., and Babonneau, F., J. Non. Cryst. Solids 100, 65 (1988).Google Scholar
10. Lewis, M. H. and Smith, G., J. Mater. Sci.,11 2015 (1976).Google Scholar
11. Hsueh, C. C. and Mecartney, M. L., submitted for publication.Google Scholar
12. Budd, K. D., Ph. D. Thesis, University of Illinois at Urbana-Champaign (1986).Google Scholar
13. Huffman, M., Goral, J. P., Al-Jassim, M. M., Mason, A. R., and Jones, K. M., to be published in Thin Solid Films (1990).Google Scholar
14. Fukami, T. and Fujii, S., Jpn. J. Appl. Phys. 24 (5), 632 (1985).Google Scholar